 EW-100 |
• 纯水冷设计，无需使用液氮冷却 • 可选装自动烘干装置 • 可支持自动成膜软件 |
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• The MBE system is a device developed by our entirely new concept. It does not use liquid nitrogen for cooling. • And automatic baking mechanism and automatic film formation software are available. |
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| EW-3 | EW-10 | EW-500 |
Features（产品特点）
1.MBE system without using liquid nitrogen.
| • There is no shroud assembly for liquid nitrogen. 10e-8 Pa or more can be easily achieved even though liquid nitrogen is not used.
• The system includes a chamber with source flanges for effusion cells as standard • In case water leakage accidentally occurs, the system adopts watertight construction in the pumping system. 2.High film quality control and excellent operation performances. |
| • Operations of pumping, cell temperature, shutter etc, are automatically contrlled. Each operation can be performed on a LCD screen.
• RHEED pattern, spectum by radical beam source, spectrum by mass spectrometer etc. can be observed and controlled on the LCD operation screen. • Preheating mechanism and radical beam source can be mounted onto the loading |
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| Temperature distribution of manipulator |
LCD operation screen for vacuum control |
